Ion-Beam Assisted Deposition

Ion-Beam Assisted Deposition

Students: Joel Li

We use Ion Beam-Assisted Deposition (IBAD) to control thin film orientation and enhance material properties. We use a model system, magnesium oxide (MgO), as a biaxially textured template film for the heteroepitaxial deposition of high temperature superconductors, tunable microwave materials, and ferroelectrics. We are exploring the mechanism of initial nucleation of biaxial texture using a novel in-situ quartz crystal microbalance (QCM) substrate, which can provide real-time mass accumulation with ~10 ng/cm2 resolution, in conjunction with surface sensitive Reflection High Energy Diffraction (RHEED). Orientation of films on the nanometer scale is important for a wide range of applications. Understanding the texturing mechanism can be applied to other technically useful materials such as polycrystalline thin film solar cells and nano-scale materials for renewable energy and electronic applications.

Related Publications

  • Biaxially-textured photovoltaic film crystal silicon on ion beam assisted deposition CaF2 seed layers on glass – James R. Groves , Joel B. Li , Bruce M. Clemens , Vincenzo LaSalvia , Falah Hasoon , Howard M. Branz and Charles W. Teplin; Energy Environ. Sci., 5, 6905 (2012)
  • Biaxial Texturing of Inorganic Photovoltaic Thin Films Using Low Energy Ion Beam Irradiation During Growth – J. R. Groves, G. J. Hayes, J. B. Li, R. F. DePaula, R. Hammond, A. Salleo,, B. M. Clemens; MRS Online Proceedings Library 1245, 1245-A20-06 (2010)
  • Fundamental Aspects of Ion Beam Assisted Deposition of Magnesium Oxide Template Films – J. R. Groves, R. F. DePaula, L. Stan, R. H. Hammond, and B. M. Clemens; IEEE Transactions on Applied Superconductivity,19, Issue 3, 3311–3314 (2009)
  • Investigation of Early Nucleation Events in Magnesium Oxide During Ion Beam Assisted Deposition – J. R. Groves, R. H. Hammond, R. F. Depaula, and B. M. Clemens; MRS Online Proceedings Library 1150, 1150-RR02-02 (2008)