Transistor Gate Materials

Transistor Gate Materials

Students: Ranida Wongpiya

Related Publications

  • Bilayer metal gate electrodes with tunable work function: Mechanism and proposed model – CH Lu, GMT Wong, R Birringer, R Dauskardt, MM Deal, BM Clemens, Y Nishi; J. Appl. Phys. 107, 063710 (2010);
  • Development and characterization of high temperature stable Ta–W–Si–C amorphous metal gates – ME Grubbs, X Zhang, M Deal, Y Nishi, BM Clemens; Appl. Phys. Lett. 97, 223505 (2010)