home

 

100-nm nMOSFET Fabrication
Using Field Enhanced Oxidation of Amorphous Silicon for Gate Patterning

100-nm pMOSFET Fabrication
Using Hybrid AFM / STM Lithography of Resist for Gate Patterning

 

 

home | micromachining | imaging | lithography | biosensors | other work

Questions? Comments? Mail : QuateWebmaster