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Flexible Cleanroom


The Flexible Cleanroom is a ~ 2000 square foot class 100 cleanroom facility used by graduate students and Stanford researchers from a wide range of backgrounds to do nano-fabrication related work, such as photolithography, wet etching, chemical processing, rapid thermal annealing, plasma cleaning, sample preparation, liftoff, chemical etching, thickness measurement, characterization, probing, testing, precision cleaning, optical assembling, delicate assembly work, etc. The lab is flexible in the sense that we work with many odd materials which are generally banned in a rigid CMOS type of facility, and we generally work with smaller chips, crystals, polymers, micro-machined devices, etc. The lab users have a lot of interaction with each other and take an ownership of the facility by volunteering to help with training on certain machines. Lab users pay on a monthly basis for only those months that they use the lab, and that payment is mainly to cover overhead such as cleanroom supplies, gases, chemicals, etc.

Contact Information

Tom Carver
(650) 723-1861 or (650) 725-2294


Research Examples

Congruent lithium niobate wafer with segmented electrodes: A three-inch-diameter magnesium-doped lithium niobate (Mg:LN) wafer patterned with 18-um pitch variable duty-cycle gratings arranged in a hexagonal pattern to allow for 19 independent material characterization experiments. A plexiglass fixture with 19 independent hexagonally-arranged high-voltage electrodes to allow for electric-field domain reversal of ferroelectric materials. The fixture was designed by Carsten Langrock and Tom Carver. Credit: Carsten Langrock (Fejer Group, Stanford)


2D array imaging sensors: The Flexible Cleanroom was used to flip-chip bond some Capacitive Micromachined Ultrasonic Transducers (CMUT) wafer chips to other chips with circuitry on them, on top of a circuit board. Credit: Anshuman Bhuyan (Khuri-Yakub Group, Stanford)


Intravenous Imaging of Arteries: The device consists of a ring of transducers with associated electronics, all mounted on the tip of a catheter with a hollow core. Equipment used within Flexible Cleanroom: flip chip bonder, reflow oven chamber, wet benches, inspection tools. Credit: Azadeh Moini (Khuri-Yakub Group, Stanford)



Getting Started

In order to become a qualified user of the Flexible Cleanroom, you need to follow each of these steps in the order as listed here:


Important notice to our External Users: The Flexible Cleanroom is only open to external users to access the Ion Mill. Usage of the Flexible Cleanroom is therefore limited to Profilometer, Optical Microscopes and Wet benches.