The Intlvac Nanoquest Research Ion Beam Milling System is a Versatile R&D platform. The ion beam processing is a controllable thin film etching technique with independent control of ion energy, ion current density, and incidence angle. Designed as a general purpose R&D tool, the Nanoquest I is capable of performing processes ranging from a simple etch to multi-angle, utilizing substrate rotation and substrate offset to achieve a superior etch. The Nanoquest System combines a 4 inch water-cooled, rotating stage, a Kaufman ion source, an easily accessible stainless steel vacuum chamber with Turbo Molecular pumping.
Cognizant Faculty Advisor
Fabrication of 1 um Hall bars of HgTe quantum wells to study QSHE; Ebeam Lithography: Raith 150 at SNF; Etching: Intlvac Ion Mill using a Ti mask; Characterization: FEI Nova SEM at SNC and Park XE-70 AFM at SNL. Credit: Reyes Calvo (Goldhaber-Gordon Group, Stanford)
In order to become a qualified user on the tool, you need to follow each of these steps in the order as listed here:
- complete the process to become lab member of SNC
- the tool is located within the Flexible Cleanroom. Complete all requirements to become a qualified user for the Flexible Cleanroom
- contact Cliff Knollenberg to get trained and qualified on the Ion Mill