Publications of Professor Thomas Kailath

C.D. Schaper, Y.M. Cho, and T. Kailath, "Low-Order Modeling and Dynamic Characterization of Rapid Thermal Processing,'' Applied Physics A: Solids and Surfaces, A:54(4):317-326, April 1992.

Y.M. Cho, G. Xu and T. Kailath, "On-line Subspace System Identification,'' Control Engineering Practice, 1(4):681-690, 1993.

H. Aghajan, C. Schaper and T. Kailath, "Machine Vision Techniques for Sub-Pixel Measurement of Critical Dimensions,'' J. Optical Engineering, 32(4):828-839, April 1993.

Y. Cho and T. Kailath, "Model Identification in Rapid Thermal Processing Systems,'' IEEE Trans. Semiconductor Manufacturing, 6(3):233-245, August 1993.

H. Aghajan and T. Kailath, "Sensor Array Processing Techniques for Super Resolution Multi-Line Fitting and Straight Edge Detection,'' IEEE Trans. Image Processing, 2(4):454-465, October 1993.

Y.M. Cho, G. Xu and T. Kailath, "On-line Subspace System Identification,'' Control Engineering Practice, 1(4):681-690, 1993.

Y.M. Cho, A. Paulraj, T. Kailath and G. Xu, "A Contribution to Optimal Lamp Design in Rapid Thermal Processing,'' IEEE Trans. Semiconductor Manufacturing, 7(1):34-41, February 1994.

C. Schaper, M. Moslehi, K. Saraswat and T. Kailath, "Control of MMST RTP: Repeatability, Uniformity, and Integration for Flexible Manufacturing,'' IEEE Trans. on Semiconductor Manufacturing, 7(2):202-219, May 1994.

Y.C. Pati and T. Kailath, "Phase-Shifting Masks for Microlithography: Automated Design and Mask Requirements,'' J. Opt. Soc. Am. A, 11(9):2438-2452, Sept.1994.

C. Schaper, M. Moslehi, K. Saraswat and T. Kailath, "Modeling, Identification, and Control of Rapid Thermal Processing Systems,'' J. Electrochem. Socy., 141(11):3200-3209, November 1994.

H. Aghajan and T. Kailath, "SLIDE: Subspace-based Line Detection,'' IEEE Trans. Pattern Analysis and Machine Intelligence, 16(11):1057-1073, November 1994.

B. Khalaj, H. Aghajan and T. Kailath, "Patterned Wafer Inspection by High Resolution Spectral Estimation Techniques,'' Machine Vision and Applications, 7:178-185, 1994.

H. Aghajan, B. Khalaj and T. Kailath, "Estimation of Skew Angle in Text Image Analysis by SLIDE: Subspace-based Line Detection,'' Machine Vision and Applications, 7:267-276, 1994.

Y. Wang, C. Schaper and T. Kailath, "Pattern Recognition of Trench Width Using a Confocal Microscope,'' Journal of Vacuum Science and Technology B, June 1995.

K. El-Awady, C. Schaper, and T. Kailath, “Improvements in C{sub pk} using real-time feedback control.” EEE Transactions on Semiconductor Manufacturing; Feb. 1996; vol.9, no.1, p.87-94

Y.T. Wang, C. Schaper, and T. Kailath “Pattern recognition of trench width using a confocal microscope.” Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures); May-June 1995; vol.13, no.3, p.840-7

Y.M. Cho and T. Kailath, “Improvement of pyrometric sensing in rapid thermal processing via adaptive cancellation of lamplight interference.” Control Engineering Practice; May 1995; vol.3, no.5, p.643-9

C. Schaper and T. Kailath, “Thermal model validation for rapid thermal chemical vapor deposition of polysilicon.” Journal of the Electrochemical Society; Jan. 1996; vol.143, no.1, p.374-81

K. El-Awady, C. Schaper, and T. Kailath , “Control of spatial and transient temperature trajectories for photoresist processing.” Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures); Sept. 1999; vol.17, no.5, p.2109-14

K. El-Awady, C. Schaper, and T. Kailath , “Integrated bake/chill for photoresist processing.” IEEE Transactions on Semiconductor Manufacturing; May 1999; vol.12, no.2, p.264-6

C. Schaper, T. Kailath, and Y.J. Lee, “Decentralized control of wafer temperature for multizone rapid thermal processing systems.” IEEE Transactions on Semiconductor Manufacturing; May 1999; vol.12, no.2, p.193-9