Rocking Curve Analysis

X'Pert Epitaxy is used to calculate layer thicknesses, lattice parameter differences between layer and substrate and layer compositions from rocking curves recorded from epitaxial samples.The simulation of rocking curves in X'Pert Epitaxy employs Tagaki-Taupin theory [1].

The fitting procedure used in X’Pert Epitaxy is based on the method first described by Klappe and Fewster for ion implanted samples.
The fitting method relies on smoothing the measured and simulated data and matching the major peaks. The smoothing is then progressively decreased allowing the minor peaks to be fitted.

1. Halliwell et al. J. Cryst. Growth 68, 523 (1984).
2. Klappe and Fewster, J. Appl. Cryst., 27, 103 (1994).

X'Pert Epitaxy Quick Start Guide.

Reciprocal Space Maps

Designed for plotting and analyzing area scan data:

extraction of line scans

saving zoomed area as new file

projecting area scan onto single scan in vertical or horizontal axis

calculating of parallel and perpendicular mismatch from asymmetrical map

plotting more than one map in the same window