The following software is available from PANalytical:

X'Pert Epitaxy

X’Pert Epitaxy has been developed for analyzing data collected using X’Pert PRO Diffractometers for materials science applications. It is specifically designed for the display and analysis of data scans from substrates and heteroepitaxial layers.

Materials which can be analyzed using X'Pert Epitaxy:

III-V compound semiconductors: GaAs, AlGaAs, InP, InGaAs, InSb etc.

II-VI compound semiconductors: CdTe, HgCdTe, ZnSe, ZnTe

GaN-based device structures

Si, SiGe alloys

Implantation in Si

Epitaxial high-Tc superconductors

Epitaxial metallic layers and multilayers

Highly oriented polycrystalline layers: PtSi on Si etc.

X'Pert Epitaxy can provide information on the following structural parameters:

Display of single scan, area scan and wafer map data

Derivation of single scan data from area scan data

Calculation of lattice mismatches between substrates and epitaxial layers

Calculation of layer composition

Calculation of layer relaxation

Calculation of layer thickness

Simulation of rocking curves for semiconductor samples

Automatic fitting of rocking curves

X'Pert HighScore Plus

This software package helps to analyze and manipulate powder diffraction data. It contains wo different products: X'Pert HighScore is primarily targeted towards phase identification, but handles and displays a large variety of diffraction data; X'Pert HighScore Plus adds crystallographic and Rietveld analysis to phase identification. This PANalytical's software module supports PDF4 relational database and allows direct pattern retrieval by subfiles, text, chemistry or crystallographic information.

X'Pert Reflectivity

X'Pert Reflectivity is a software package for displaying, simulating and fitting X-ray Reflectivity curves. It is used to determine layer thickness, density and roughness of thin layered samples. The software helps to significantly speed up the analysis by providing automatic fitting of simulated to experimental specular x-ray reflectivity curves. It provides a choice of three automatic fitting strategies. X'Pert reflectivity comes with an extendable materials database containing scattering factors for all elements (for Cu and Mo targets) as well as density values and other important parameters.

X'Pert Texture

The X'Pert Texture is a standalone analytical module for texture analysis by means of x-ray diffraction. X'Pert Texture's interface enables to perform calculations of pole figures, inverse pole figures and Orientation Distribution Functions (ODF). Graphical representations of data in 1, 2, "2.5", and 3D modes provide an overview of analytical data.

X'Pert Stress

X'Pert Stress combines classical uni-axial and bi-axial sin^2(Y) residual stress analysis with an x-ray elastic constants database, with all established methods for peak position determination and with a new routine for correcting minor misalignments of either sample or diffractometer. The package offers a complete overview of scans, parameters, sin^2(Y)-plots and numerical stress results in one application window.