(2005 - ) Stanford University
Professor (2005 - )
Department of Electrical Engineering
(1987 - 2005) University of California at Berkeley
Robert S. Pepper Distinguished Professorship (2004 - 2005 )
Chair, Electrical Engineering Division (2002 - 2005)
Associate Chair, EECS Dept. (2002 - 2005 )
Professor (1993 - 2005)
Associate Professor (1989 - 1993)
Assistant Professor (1987 - 1989)
Department of Electrical Engineering and Computer SciencesProfessor (1997 - 2005)
Department of Mechanical EngineeringDirector (1993 - 2005)
Associate Director (1987 - 1993)
Berkeley Sensor & Actuator Center
(1985 - 1987): Massachusetts Institute of Technology
Assistant Professor, Dept. of Electrical Engineering and Computer Science
(1984 - 1985): Carnegie-Mellon University
Assistant Professor, Dept. of Electrical and Computer Engineering
Design and fabrication of microsensors and microactuators; development of merged CMOS-microstructure processes; biomimetic nanofabrication processes.
University of California at Berkeley: Ph.D., December 1984, M.S., December 1981.
Engineering Science, Dept. of Electrical Engineering and Computer Sciences.
Harvey Mudd College, Claremont, California, B.S., May 1979.
Major: physics, applied option.
U.S. National Academy of Engineering: 2005.
Citation: "for contributions to the development of microelectromechanical systems in processes, devices and systems."
IEEE Cledo Brunetti Award (with R. S. Muller): 1998
Citation: "for leadership and pioneering contributions to the field of microelectromechanical systems."
Fellow, IEEE: 1996.
Citation: "for seminal contributions to microfabrication technologies, devices, and micro-electromechanical systems."
Analog Devices Career Development Professorship, 1988 1991
NSF Presidential Young Investigator Award, 1986
IBM Faculty Development Award, 1984 1986
David J. Sakrison Memorial Prize and Demetri Angelakos Memorial Achievement Award
Dept. of Electrical Engineering and Computer Sciences, Univ. of California, Berkeley, 1984
Head of Undergraduate Affairs: Dept. of EECS, 1992 1993.
Chair, Undergraduate Curriculum Reform Committee: Dept. of EECS, 1992 1993.
Member, Strategic Planning Committee: Dept. of EECS, 1993 - 1995
College of Engineering, 1994 - 1995
Co-Chair, Curriculum Revision Committee: Dept. of EECS, 1997 1998.
Associate Chair, Dept. of EECS, 2002 - 2005
Chair: MEMS Technical Committee, IEEE Electron Devices Society, 1998 - 2001
Trustee: Transducer Research Foundation, Inc. Cleveland, Ohio, 1995
Technical Program Chair: 12th International Conference on Solid-State Sensors, Actuators, and Microsystems, Boston, Mass., June 8-12, 2003
General Chair: Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 1996.
Technical Program Chair: Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 1994.
General Co-Chair: 3rd IEEE Micro Electro Mechanical Systems Workshop, Napa Valley, California, February 1990.
Technical Program Co-Chair: IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, Utah, February 1989.
Microsystem Technology, 1994 -
Sensors and Actuators A, 1988 -
IEEE/ASME Journal of Microelectromechanical Systems, 1998 - 2002
ACLARA BioSciences, Mountain View, Calif., 1996 - 2001
Analog Devices, Cambridge, Mass., 1989 -
Ardesta LLC, Ann Arbor, Michigan 2001 -
DaimlerChrysler, Circle Member Group, Stuttgart, Germany, 1997 - 2001
Discera, Ann Arbor, Michigan 2001 - 2004
Gerson Lehrman Group, Council of Communications and Technology Advisors, 2000 - 2004
Medcam, Bellevue, Wash., 1998 - 1999
MEMSIC, Andover, Mass., 1999 - 2004
MicroReactor Systems/Gener8, Mt. View, Calif., 2003 -
Motion Sense, Fremont, Calif., 2000 - 2002
Sandia National Laboratories, Albuquerque, N.M., 1996 -
Siimpel, Arcadia, Calif., 2000 -
Silicon Clocks, Berkeley, Calif., 2004 - (Co-Founder and Chief Scientist)
Silicon Light Machines, Sunnyvale, Calif., 1995-98
U.S. Air Force Scientific Advisory Board, 2004 -
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