ME342: MEMS Laboratory

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Lectures and Readings

Project Resources

MEMS '06 Format

Lectures and Readings


Lecture Description
 Readings
Related Files

ME342 Overview
Fabrication Process
Review fab process and structures to be fabricated.
Madou: Ch.10 pp 615-630

Process Run Description pdf
Process Run Sheet pdf

Cleanliness   SNF Cleanroom Practices
SNF Equipment Groups
Properties of Silicon, Piezoresistors, and Implant; TSUPREM
Micromechanical and Tribological Characterization of doped single crystal silicon and polysilicon films for MEMS devices
Madou: pp 123-134, pp 183-206

TSUPREM Initialization cshrc
TSUPREM Manual pdf
L-Edit (Student version) zip

 
Transduction
Madou: Ch. 9 (skim)
 
Lithography and Pattern Transfer
Madou: pp 1-32 (read), pp 33-71 (skim)
 
Surface Micromachining and Film Deposition
Silicon as a mechanical material pdf
Madou: Ch.5 pp 134-143 (read), pp 144-175 (skim), pp 344-357 (skim)
 
Etching
Madou: Skim Ch. 2 and rest of Ch.4, skim pp. 379-423
 
Brainstorming / Creativity / Innovation   Myers-Brigg Topology
Six Hats xls
MEMS Reliability
Madou: Skim Ch.8 on packaging and substrates (skim)
 
Quality Function Deployment (QFD)  

QFD Template xls
MEMS QFD Example xls

Beam Mechanics    
Microfluidics
Selected readings
 
MEMS Packaging
Madou: Ch.8 on modeling (skim)
Selected readings
 
Signal Conditioning and Measurements
Senturia, Microsystems Design: Ch. 16 (available on course reserve in Terman)
 
"Quick and Dirty" MEMS Processing
Soft Lithography pdf
Selected readings
  • Modified PDMS for Protein- and Cell-Resistant Surfaces pdf
  • Microarray in PDMS pdf
  • Biomaterials pdf
  • SU8 to SU8 bonding pdf
  • SU8 bonding pdf
  • Polymer brushes pdf
  • In Vivo Bioluminescence pdf
  • Zeta Potential for Microfludic Polymers pdf
  • Polymer wafer bonding pdf
  
Issues in Biomedical Design
Madou: Ch.7 pp.423-458 (skim)
Selected readings
  • Biomedical Surface Science: Foundations to Frontiers pdf
  • Biointerface Analysis for biosensor research pdf
  • Application of MEMS in Surgery pdf
  • Biomedical Microsystems for Minimally Invasive Diagnosis and Treatment pdf
  • Medical Applications of MEMS pdf
  • Biocompatibility of MEMS pdf
  • Multiple Label-Free Biodetection and Quantitative DNA-Binding Assays on a Nanomechanical Cantilever Array pdf
  • Cell Force Review pdf
  • Heart Cell (MEMS) pdf
  • In Vivo Inflammatory and wound healing effects of gold electrode pdf
  • BioMEMS by Vliet et al pdf
  • Microenvironment design considerations for cells pdf
  • BioMEMS Review pdf
  • Microengineering of Cellular Interaction pdf
  • Microfabricated Microneedles pdf
 

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Project Resources

Here are a few guides and resources available to help you with your design projects:

MEMS'06 Abstract format (example) Additional examples of project abstracts can be found in the Projects Archive.

 

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