Plasmas and Materials Processing

Plasmas and Materials Processing
Ned Hammond

Plasmas exhibit a rich variety of complex, non-linear behavior and are heavily used in industry. Applications of plasma processing are quite broad; the ability of a chemically active plasma to change the surface properties of materials plays a key role in such industries as aerospace, automotive, steel, biomedical, and toxic waste management. For example, a plasma can be used to harden a surface to improve wear resistance. Another way that the plasma can affect a surface is to break down a gas to make it more reactive; the radical components of the gas then react with the surface and either remove or deposit material on the surface.

The objective of this work is to develop a conservative numerical algorithm that provides a robust, rapid, and accurate solution to the plasma fluid equations. To date, an unsteady, multi-dimensional plasma simulation has been written.

Most of the work is computational, but some of the work is theoretical. You need to know the theory (and have a good background in math) to understand what the computational results are telling you and also to understand why the computational methods work or don't work.

This picture shows electron number density in a capacitively-coupled plasma reactor. The reactor is used to create and contain the plasma. The geometry is based on the GEC Reference Cell configuration. This reference cell is a "standard" design which resembles the plasma reactors used in industry, and it is used often in experiments, so most available experimental data are from this geometry. The simulation is two-dimensional with cylindrical coordinates (the centerline is to the left, and the outer diameter of the reactor is to the right).